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MPCVD Reactor

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MPCVD Reactor

Developed by Crysdiam and upgradable 

  • Product Description
  • Specifications
  • Related Products

Product Description

The MPCVD reactor is developed by Crysdiam with with complete intellectual property rights and is upgradable.

Specifications

Power Supply AC380±10% V three-phase five-wire system 50Hz
Microwave Output Power 0-6kW continuously adjustable
Power Stability Better than 1%
Microwave Frequency 2450MHz±50MHz
Vacuum Leakage Rate Better than 1×10−9 Pa· m³/s
Effective Deposition Area ≥φ60mm
Air Supply ≥ 4 way (customisable)
Microwave Leakage Values <5mW/cm²
Working Environment Temperature 15-40℃, relative humidity ≤70%, no corrosive gas
Microwave Conversion Efficiency ≥60%

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